Gas Sensing Technique by using Molecular Adsorption on Micro Cantilever Surface
نویسندگان
چکیده
منابع مشابه
Cantilever enhanced gas sensing using photoacoustic spectroscopy
ii Abstract (in Finnish) iiiin Finnish) iii
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ژورنال
عنوان ژورنال: Journal of the Vacuum Society of Japan
سال: 2012
ISSN: 1882-2398,1882-4749
DOI: 10.3131/jvsj2.55.383